Photolithography at a wavelength of 193 nm in the deep UV with water immersion lenses can now produce microelectronics containing features with a half-pitch as small as 40 nm. The big question is how much further can the technology be pushed?
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References
Moore, G. E. Electron. 38, 114–117 (1965).
Rubingh, R. et al. Proc. SPIE 5754, 681–692 (2005).
de Klerk, J. et al. Proc. SPIE 6520, 65201Y1 (2007).
Totzeck, M. J. Microlith. Microfab. Microsyst. 4, 031108 (2005).
Lin, B. J. J. Microlith. Microfab. Microsyst. 5, 033005 (2006).
Burnett, J. H. et al. SPIE Proc. 6154, 445–456 (2006).
Dusa, M., Arnold, B. & Fumar-Pici, A. IEEE Int. Symp. Semiconductor Manufacturing 177, 177–180 (2005).
Acknowledgements
We gratefully acknowledge the cooperation of ASML and the help of Tilmann Heil and Markus Wiederspahn during the preparation of this manuscript.
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The authors of this piece are also employees of the company Carl Zeiss SMT, which is involved in the development of deep UV lithography.
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Totzeck, M., Ulrich, W., Göhnermeier, A. et al. Pushing deep ultraviolet lithography to its limits. Nature Photon 1, 629–631 (2007). https://doi.org/10.1038/nphoton.2007.218
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DOI: https://doi.org/10.1038/nphoton.2007.218
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