Correction to: Nature Materials https://doi.org/10.1038/s41563-022-01424-w. Published online 19 December 2022.

The version of this article originally published was updated on 25 January 2023 to include a second affiliation for Junho Choi: “Semiconductor Integrated Metrology Team, Korea Research Institute of Standards and Science, Daejeon, Republic of Korea.” This change was made in error and has now been corrected in the HTML and PDF versions of the article.