Fig. 5: SEM image and measured response of fabricated AlN S0 Lamb wave resonator.
From: AlN MEMS filters with extremely high bandwidth widening capability
SEM images of the (a) fabricated AlN S0 Lamb wave resonator, (b) Al IDTs, (c) etched AlN sidewall, and (d) 1μm AlN crystal. e Measured admittance response of the fabricated AlN S0 Lamb wave resonator. The measured response is fitted by the MBVD model
