Fig. 6: The topology and performance of the proposed AlN S0 first-order and second-order filter.
From: AlN MEMS filters with extremely high bandwidth widening capability
a Topology of the AlN S0 first-order filter. b Simulation of the AlN S0 first-order filter. The lumped element parameters and the extracted filtering performance is added in the inset. c Topology of the AlN S0 second-order wideband filter. d Simulation of the AlN S0 second-order wideband filter. The lumped element parameters and the extracted filtering performance are added in the inset
