Fig. 3: Fabrication and dimension structures of the μTUD.
From: Micro triboelectric ultrasonic device for acoustic energy transfer and signal communication
a Detailed fabrication process of the μTUD. b Optical microscope image and (c) selected area enlarged image of the μTUD cells (inset shows a digital photograph). d SEM and (e) enlarged images of the cross-sectional view of the μTUD cavity.
