Table 1 Anodic Oxidation Conditions for Porous Samples a, b, c, and d.
From: White Light Emission from Fluorescent SiC with Porous Surface
Samples | Sub. types | Dopants | Anodic etching duration | Oxidant | Porous thickness |
|---|---|---|---|---|---|
a | Commercial 6H-SiC substrate (SiC-Sub) | N(background doping level) | 960 min | 0 mol/L | 13 µm |
b | Fluorescent 6H-SiC | B, N | 960 min | 0.015 mol/L | 21.4 µm |
c | Fluorescent 6H-SiC | B, N | 200 min | 0.015 mol/L | 4.6 µm |
d | Fluorescent 6H-SiC | B, N | 500 min | 0.015 mol/L | 10 µm |
