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Advanced filters: Author: "Christian Wagner" Clear advanced filters
  • Extreme ultraviolet lithography extends photolithography to much shorter wavelengths and is a cost-effective method of producing more-advanced integrated circuits. Although some infrastructure challenges still remain, this technology is expected to begin high-volume microchip production within the next three years.

    • Christian Wagner
    • Noreen Harned
    Comments & Opinion
    Nature Photonics
    Volume: 4, P: 24-26